DOI：10.1063/5.0097776 

Abstract

    This paper proposes a piezohydraulic hybrid actuator driven by a resonant vibrator based on two rhombic micro-displacement amplifiers. The resonant piezohydraulic hybrid actuator consists of a resonant piezoelectric vibrator, a pump body, a manifold, a return valve, and an output cylinder. The vibration mode of the piezoelectric vibrator is simulated and the working principle of the resonant piezohydraulic hybrid actuator is depicted. Then the performance of the piezohydraulic hybrid actuator is experimentally investigated, and the effects of exciting frequency, exciting voltage and bias pressure are analyzed. The results demonstrate that the hybrid actuator performs the best when the exciting frequency is near the resonant frequency, meanwhile, the higher the exciting voltage, the better the performance. Moreover, it indicates that a larger bias pressure will bring a larger reaction force to the vibrator and reduce the performance of the actuator system. The maximum blocked force and no-load velocity are 378 N and 4.8 mm/s, respectively, when the bias pressure is 1.5 MPa and the exciting voltage is 500 V_pp.

摘要

  提出了一种由基于双菱形微位移放大器的谐振振子驱动的压电液压马达。压电液压马达由谐振压电振子、泵体、歧管、复位阀以及液压缸等组成。仿真了压电振子的振动模式，并描述了谐振振子驱动压电液压马达的工作原理。然后对压电液压马达的性能进行了实验研究，分析了激励频率、激励电压和偏压的影响。结果表明，当激励频率接近谐振频率时，压电液压马达的性能最好；同时，激励电压越高，性能越好。此外，更大的偏压将给压电振子带来更大的反作用力，会降低系统的性能。当偏压为1.5MPa，激励电压为500Vpp时，压电液压马达的最大阻断力和空载速度分别为378N和4.8mm/s。

图1 基于谐振振子驱动的压电液压马达的系统结构

图2 压电液压马达的性能

亮点：

  设计了一种基于谐振振子驱动的压电液压马达，谐振振子由两个菱形位移放大机构以及压电堆组成，振子位移可以通过谐振放大。实验研究了压电液压马达系统的性能，并分析了激励频率、激励电压以及预置偏压的影响。