DOI:10.1109/TIM.2025.3585205

Abstract

The ultrahigh-quality factor is an essential parameter for sensors such as hemispherical resonant gyroscopes (HRGs). This study proposes a novel electrostatic excitation and capacitive detection scheme for insulated resonators using interdigital electrodes without the need to deposit a metal film on the resonator to maximize its quality factor. The method uses the polarization of the resonator in the electric field generated by the interdigital electrodes to achieve noncontact excitation, and the capacitance change caused by the vibration of the resonator to achieve noncontact detection. Theoretical models of the electrostatic force and capacitance are developed, and the electrode parameters are optimized via finite element simulation. A hemispherical resonator is fabricated, and its characteristics are obtained experimentally. The results show that the interdigital electrodes can effectively excite the four-antinode mode, and the maximum amplitude of the antinode can reach 2.67 μ m. The sensitivity of the interdigital electrodes and detection circuit to vibration is 2.10 V/ μ m. Although the maximum quality factor we can obtain is now only 8.98 million, there is hope for a higher quality factor. This approach avoids the performance degradation caused by metal films and is applicable to resonators of various shapes and insulating materials, offering potential for high-performance resonant sensors.

图片摘要

图一：实验系统示意图。

图二：（a）检测电路的输出电压和不同激励电压下的谐振幅度（b）高压激励信号和检测电路的输出信号（c）振幅-频率和相位-频率曲线（d）谐振器的衰减时间测量。