DOI: 10.1109/TIM.2025.3650281

Abstract

This study proposes a novel differential eddy current inductive displacement sensor (ECIS) that achieves synchronous three-axis (XYZ) displacement measurement, overcoming the limitations of traditional single-axis detection. The sensor incorporates a spiral excitation coil, an aluminum target, and differential receiving coils bonded to the target surface. A hybrid domain optimization framework combining theoretical modeling and finite-element analysis (FEA) was developed to address the challenges of multiphysics coupling in proximity to conductive targets. The coil geometry was systematically optimized through numerical calculations to maximize sensitivity while suppressing cross-axis interference. Experimental validation demonstrated a displacement range of ±1500 µm in the x- and y-axes and ±130 µm in the z-axis, achieving quasistatic resolutions of 10, 13, and 0.45 nm, respectively. The cross-sensitivity between axes was maintained below ±0.5%. The sensor’s thermal stability was enhanced through Zerodur glass probe structures and differential topology, yielding a temperature drift coefficient of 162 ppm/◦C. These results validate the proposed optimization methodology and highlight the sensor’s potential for ultraprecision metrology.

文章摘要

本研究提出了一种新型的差分涡流感应位移传感器（ECIS），该传感器能够实现同步的三维（XYZ）位移测量，克服了传统单轴检测的局限性。该传感器包含一个螺旋式激励线圈、一个铝质目标板以及粘附在m目标表面的差分接收线圈。开发了一个结合理论建模和有限元分析（FEA）的混合优化框架，以解决靠近导电目标时多物理场耦合的难题。通过数值计算对线圈几何结构进行了系统优化，以最大限度提高灵敏度并抑制跨轴干扰。实验验证表明，在x轴和y轴上的位移范围为±1500 微米，在z轴上的位移范围为±130 微米，分别实现了10、13和0.45纳米的准静态分辨率。各轴之间的交叉灵敏度保持在±0.5%以下。通过使用微晶玻璃差分结构探头，该传感器的热稳定性得到了提升，其z方向的温度漂移系数为162ppm/℃。这些结果验证了所提出的优化方法的有效性，并突显了该传感器在超精密测量方面的潜力。

图片摘要

图一：探头结构和实验结果。

亮点

1.提出了一种创新的三自由度位移传感器结构，并针对该结构开发了一种专门的性能优化方法。 

2.该传感器具有卓越的性，兼具宽广的测量范围和高分辨率。 

3.在所有三个方向上，轴间耦合误差较小，从而能够显著降低数据后处理的复杂程度。